半導体製造装置関連 KAT株式会社

半導体製造業装置関連消耗部材及びメンテナンス事業

KAT株式会社 ≫ MFC定額修理&短納期製品 ≫

MFC, INJECTION VALVE
定額修理＆短納期代替品

各メーカーのMFC/IV対応可能

AERA
HORIBA
UNIT
TYLAN
その他特殊

例）SAM/SFC-670, UFC-8161 等

MASS FLOW CONTROLLER
INJECTION VALVE REPAIR

INJECTION VALVE
INJECTION VALVE
INJECTION VALVE
INJECTION VALVE
MFC
SEC-Z512KX, SEC-Z522KX
SV-P1203
FC-PA7810C,FC-7800C
AERA MFS-402A MASS FLOW STANDARD
Aera PV-104C
SEF-8240 SET

MODEL LIST

HORIBA STEC MFC
SEC-7330/ SEC-7340/ SEC-7350/ SEC-7440
SEC-4400/ SEC-4401/ SEC-4500/ SEC-4550/ SEC-4600
SEC-Z511/ SEC-Z512/ SEC-Z514
SEC-F730/ SEC-V110
SEC-Z522/SEC-Z313M

SV-P1203

UNIT MFC
UFC-8165
UFC-8160

AERA MFC
FC-770AC/ FC-780C/ FC-781C/ FC-771AC
FC-7700CU/ FC-7710CU/ FC-R7710DC/ FC-7810CU
FC-D980C/ FC-D981SBC
FC-790C/ FC-791C
FC-261J/ FC-485CV
FC-985BF

MKS MFC
MKS MFC 1159B/1179A/1259C

LX-1200

INJECTION VALVE
IV-2410AV
IV-2411AV

その他：
AERA MFS-402A MASS FLOW STANDARD