半導体製造装置関連 KAT株式会社

半導体製造業装置関連消耗部材及びメンテナンス事業

KAT株式会社 ≫ SEBRE消耗部品 ≫

Sebre parts

02-117255-00 ASSY PC FLOW METER
04-311910-00 PM KIT,CUP REBUILD,APC 1MM,300
04-357414-00 KIT,PMM CHUCK,BUTTON AND HOLDERS,EXTREME
15-119067-00 MODIFIED CUP,END EFFECTOR
15-119068-00 RING,CUP,END EFFECTOR
15-173189-00 CUP,VAC,300MM AMML.VESPEL
15-257341-01 SPACER,INSERT,.450,PPS
15-269145-00 FEEDTHRU,ANODE CONTACT,SBR-XT,SAC-CONAN
15-287018-00 BUS,RING,CUP,1MM EE,NR
15-295407-05 INSERT,HRVA,EXTREME CELL,11.47X14
15-302518-00 STRUT,CUP,APC
15-311187-00 BASE,CATIONIC MEMBRANE,PET EXTREME
15-327152-00 CUP,VACUUM,300MM ANNEAL,VESPEL
15-357409-00 HOLDER,BUTTON PEM CHUCK
15-372360-00 BLOCK,NUT,DC MEMBRANE CLAMP,IRISCELL
15-372361-00 GASKET,SAC MEMBRANE SEAL,IRISCELL
15-372362-00 GASKET,DC MEMBRANE SEAL,IRISCELL
15-373480-00 PIN,TAPED,DC MEMBRANE CLAMP,IRISCELL
16-151753-00 ACT TOPHAT,300 ANNEAL WLDMENT
17-413579-00 PLATE,CHARGE,TI
20-283624-00 PAD,ELASTOMER,G67P,EE
22-122198-00 SEAL.INNER VAC,HI-FLEX,200MM
22-122199-00 SEAL.OUTER VAC,HI-FLEX,200MM
22-287767-00 SEAL,CONE,APC,MCD
22-391970-00 O-RING,AS568-460,VITON,50DURO,BLACK
27-264297-00 SLIP RING
34-403865-00 SENSOR,ULTRASONIC 15 TO24VDC
34-384779-00 SENSOR, PROXIMITY/REFLEX
61-353660-00 END EFFECT PAD
713-021725-001 PAD,INSERT,WAFER OLDER,ISOTROPIC ETCH
713-230002-001 PAD,ELASTOMER,.021 SA
713-230002-002 PAD,ELASTOMER,.019 SA
713-230002-003 PAD,ELASTOMER,.020 SA
713-230002-004 PAD,ELASTOMER,.020 SA, IM
713-182341-009 INSERT,HRVA,IRIS CELL 11.6X14.5
713-196778-001 GSKT,SAC MEMBRANE,FUSION
713-198058-002 GSKT,DC MEMBRANE,FUSION
713-206369-001 GAKT,ADHESIVE,PLATING CELL/TOPHAT
713-236821-001 CUP,S4OH,SABRE3D
713-236821-003 CUP,S4OH,SABRE3D
713-238718-002 NOZZLE TIP,EBR,HD PEM
715-194713-003 RING,DC,FUSION

CONTACT
17132974-00 CONTACT, 296MM,2 TIP
17-318098-00 CONTACT,1MM,APC,N6
17-356435-00 CONTACT,APC,300MM,1MM EE
17-431656-00 CONTACT,300MM,.55MM TP,SBR-XT
714-174553-001 CONTACT,300MM,.95TP,N5,DN
714-206846-001 CONTACT,300MM,.70TP,N5 DN
714-278365-001 CONTACT,300MM,1.15TP,N5,DN,NOTCH AVOID

LIP SEAL
18-428604-00 RING,SEAL LIP,2.25MM EE,300MM GT
22-117504-00 SEAL,WAFER,296MM
22-3051651-00 SEAL,LIP,1.75MM EE,APC 300MM
22-312771-00 SEAL,LIP ,APC,1MM,FLAT
713-173534-001 SEAL,LIP,2.25MM EE,300MM
713-216986-001 RING,SEALLIP,2.40MM EE,300MM,SJ
713-A65028-001 RING SEAL,LIP,2.50MM EE,WIDE,300MM
839-191112-001 SEAL,LIP.1MM EE,300MM.NF,CMM,11

SNUBBER
15-302578-00 SPRING,SNUBBER,APC
15-365387-00 SPRING,SNUBBER,KEYHOLE,APC
15-412730-00 SPRING,SNUBBER,KEYHOLE,APC
17-115725-00 SNUBBER,WAFER
714-214686-001 SPRING,SNUBBER,PINNED,CUP XT

FLOW SWITCH
02-142638-00 ASSY,FLOW SNSR, 50ML,EBR,BRE
02-142639-00 ASSY,FLOW SNSR, 12ML,EBR,ETCH
02-142640-00 ASSY,FLOW SNSR, 12ML,EBR,FSA
34-291572-00 SWITCH,WATER FLOW
34-291573-00 SWITCH,WATER FLOW
34-291574-00 SWITCH,WATER FLOW
61-370039-02 H2O2 EBR FLOW SENSOR
61-370039-03 FLOW SWITCH ASSY
61-370044-01 FLOW SWITCH ASSY
61-370044-02 HSSO4 EBR FLOW SENSOR
61-370044-03 FLOW SWITCH ASSY
61-327621-00 H2SO4 FRONT SIDE FLOW SENSOR(12ml)
61-327809-00 FLOW SWITCH ASSY
62-307712-01 FLOW SWITCH ASSY
62-417276-00 FLOW SWITCH ASSY
771-297226-001 FLOW SWITCH ASSY
771-297226-004 FLOW SWITCH ASSY
771-297226-006 SWITCH,FLOW 4.5ML/MIN,1/8 PLR,PEM H2O2
771-297226-007 FLOW SWITCH ASSY
771-297226-019 SWTCH,FLW,12 ML/MIN,1/8X4MM PLR,PEM1 FSC
771-297226-025 SWTCH,FLW,50 ML/MIN,1/8X4MM PLR,PEM1 BSE
771-297227-010 FLOW SWITCH ASSY

MEMBRANE
15-302588-00 MEMBRANE, CATIONIC, EXTREME, NEXT  CELL
15-340123-00 MEMBRANE,CATIONIC
15-374450-00 MEMBRANE, CATIONIC, SAC, IRISCELL
15-374451-00 MEMBRANE, CATIONIC, DC, IRISCELL
15-375743-00 MEMBRANE,PLATING CELL,SAC
15-385111-00 MEMBRANE, CATIONIC, EXTREME CELL
15-395485-00 MEMBRANE,PES,IA
15-406361-00 MEMBRANE,PES.NI
713-196800-001 MEMBRANE,CATIONIC,SAC,FUSION
713-208466-001 MEMBRANE, CATIONIC,SAC,3DXT

TOP & BOTTOM CUP
15-267616-00 CUP,TOP,KNIEF EDGE,TAPERED 300
15-282814-00 CUP,TOP,1MM EE
15-340043-00 OTHER,CUP, BTM, APC,1 MM
15-357896-00 CUP,BOTTOM,APC,1.75MM,PAI
15-357957-00 CUP,BOTTOM,APC,1MM,PAI
15-407454-03 UPPER CUP,CU,NI CUP APC
713-223136-001 UPPER CUP,CU,NI BOTTOM,2.40MM,STD
713-248894-001 CUP,BOTTOM,2.7MM EE,STD,300MM
715-189682-001 715-189682-001

CONE
15-318030-00 CONE,APC,300MM
15-383578-00 CONE,APC,300MM
713-161222-012 CONE,FUSION,300MM WELDED,POLYCARBON

PROBE
02-339691-00 ASSY,POT PROBE TIP
02-347254-01 ASSY,PROBE,POTENTIOSTATIC
02-347254-02 ASSY,PROBE,POTENTIOSTATIC
02-347254-03 ASSY,PROBE,POTENTIOSTATIC
15-279589-00 ROD,.125IN,PROBE,POTENTIOSTAT
16-385621-00 PROBE,POT,IRISCELL
715-196405-001 PROBE,POT,FUSION
715-228142-001 PROBE.POT,3N CO,FUSIONCELL

HRVA PLATE
15-300204-00 PLATE,UHRVA,11.2", 9465 X.026
15-422974-00 HRVA PLATE

PEM CHUCK
16-403245-00 PEM CHUCK