KAT株式会社 ≫ Quantum装置消耗部品 ≫
Quantum設備消耗部品
| Category | OEM PN | AMAT Description |
| SRC | 0040-01372 | BODY ION SOURCE LEAP2 |
| SRC | 0015-01765 | Feed through modified 4 |
| SRC | 0015-02291 | Quantum II feedthrough 3 |
| SRC | 3300-97236(Q1)/0015-01297(Q3) | G2 feedthrough G2 feedthrough |
| SRC | 0040-96349 | SUPPORT,UPPER source insulator 6 |
| SRC | 0040-05988 | SUPPORT,ARC CHAMBER,LOWER source insulator |
| SRC | 0040-01080 | connector flexible Q1 |
| SRC | 0020-18692 | STARP FILAMENT LONG |
| SRC | 0020-86731 | STARP FILAMENT SHORT |
| SRC | 0020-87572 | PLATE KEYED CONNECTOR 4 |
| SRC | 0020-48671 | PLATE KEYED CONNECTOR 4 |
| SRC | 0020-47082 | ANTICATHODE FEEDTHROUGH LINK BIAS |
| SRC | 0041-11797(Q1)/0040-49775(Q3) | gas line assembly source |
| EXT | 0040-44083 | SHIELD TOP HAT QI |
| EXT | 0020-64466 | SHIELD TOP HAT QIII |
| EXT | 1080-01483 | Quantum I gap motor |
| EXT | 0040-96829 | SHAFT BELLOWS ASSEMBLY ext |
| EXT | 3060-90214 | BSG BEARING BALL QI |
| EXT | 3040-00024 | SCREW ball screw z |
| MRS | 0020-99517 | MTS BTM SHIELD MRS |
| MRS | 1210-90555 | resistor MRS |
| PFS | 0020-89171 | SUPPORT INSULATOR arc chamber |
| PFS | 1030-90022 | MAGNET SOURCE PFS |
| PFS | 0021-90311 | FILAMENT INSULATOR PFS |
| PFS | 0040-42311 | ARC CHAMBER ASSY PFS |
| F/T | 0010-91214 | FLIGHT TUBE ASSY ULTRACLEAN |
| F/T | 9010-01396 | FLIGHT TUBE ASSEMBLY QIII |
| MOTOR | 1080-90080 | TILT motor tilt |
| MOTOR | 9010-01506 | transfer arm motor TX |
| MOTOR | 1080-00099 | exchange arm motor |
| PCB | 0100-02145 | Quantum III LATERAL PCB |
| PCB | 0100-02146 | Quantum III GAP PCB |
| PCB | 0100-00991 | Quantum I GAP PCB |
| PCB | 0100-00559 | source magnet control |
| PSU | 0090-91640 | ASSY 45W XP PSU |
| PSU | 1140-00014 | PSU 24V 100W |
| PSU | 1140-00161 | QIII G2 PSU |
| PSU | 1140-00165 | QI G2 PSU |
| TX | 0880-00030 | linear track encoder |
| TX | 0760-90022 | linear track coupling |
| TX | 3120-01021 | linear track breaker |
| OTHER | 9090-00292 | GAS panel chassis |
| OTHER | 3870-90394 | gate valve TC cryo |
| OTHER | 3700-90466 | blade ferro seal blade |
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P5000 ROBOT
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MFC,LFC
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Controllers
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ROBOT
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ARM
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RF電源
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MOTOR、ACTUATOR
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SOCKET
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BOARD
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IC CHIP
