Susceptor
| Size | P/N | Description |
| 6" SUSCEPTOR | 0010-60011 | SPARE 6" TEOS SUSCEPTOR |
| 6-5" SUSCEPTOR | 0190-09400 | SUSC ASSY T2 WELDED, 125 MM SO/N |
| 8" SUSCEPTOR | 0010-09463 0010-09464 0010-10036 |
SUSCEPTOR ASSY TEOS 200MM SUSCEPTOR ASSY NITRIDE 200MM ASSY, SUSC, BB TEOS, 200MM, SCREWLESS |
| 8-6"SUSCEPTOR | 0010-02864 0010-10565 |
ASSY, BABPSG 8"-6" TISABB THK SUSCEP ASSY, BABPSg 8"-6" TISABB THK SUSCEPTOR |
| 156*156 (200mm) | Solar cell susceptor | |
| 156*156 (220mm) | Solar cell susceptor |
