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ION IMPLANTER部品
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Flight Tube (9500xR) | Flight Tube (xR80) | |||
OEM P/N: | 0010-91214 | OEM P/N: | 9010-00928 | |
TOOL: | AMAT 9500xR | TOOL: | AMAT xR80 | |
Extraction (9500xR) | Extraction (xR80) | |||
OEM P/N: | 0010-91615 | OEM P/N: | 0010-93038 0010-93039 |
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TOOL: | AMAT 9500xR | TOOL: | AMAT xR80 | |
Heatsink 200MM (Black) | Heatsink 200MM (Grey) | |||
OEM P/N: | 0040-95291 | OEM P/N: | 0040-95291 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Fixed Restrain 200MM | Moving Clips 200MM | |||
OEM P/N: | N/A | OEM P/N: | 0010-91419 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
DD Spin Motor | DD Spin Motor | |||
OEM P/N: | 0010-91581 | OEM P/N: | 9010-00054 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT xR80/Quantum | |
MRS Assembly | Blade Assembly | |||
OEM P/N: | 0010-91802 | OEM P/N: | 0010-99092 | |
TOOL: | AMAT 9500xR/xR80/Quantum | TOOL: | AMAT 9500xR/xR80 | |
Cassette Indexer 200MM | HDPFS Assembly | |||
OEM P/N: | 0010-91312 | OEM P/N: | 0240-61079 0240-91922 |
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TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Source Isolation Valve | Cryo Gate Valve | |||
OEM P/N: | 0010-91829 | OEM M/N: | 11210-1201R | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Cassette Tray 200MM | Carousel 200MM | |||
OEM P/N: | 0010-92132 | OEM P/N: | 0010-92188 | |
TOOL: | AMAT xR80 | TOOL: | AMAT 9500xR/xR80 | |
AMU Power Supply | Suppression Clamp Box |
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OEM P/N: | 1140-00254 1140-90093 |
OEM P/N: | 0090-91799 0090-91816 |
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TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
G2 Power Supply | Focus Power Supply | |||
OEM P/N: | 1140-90164 | OEM P/N: | 0090-91806, 0090-91415ITL |
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TOOL: | AMAT xR80 | TOOL: | AMAT xR80 | |
Batch Notch Orienter Micro Controller (RECIF) |
PFS Power Supply | |||
OEM P/N: | 0090-91689 | OEM P/N: | 1140-90090 | |
TOOL: | AMAT xR80 | TOOL: | AMAT 9500xR/xR80 | |
Wafer Loader Cassette Indexer PCB | EVR Lateral Servo PCB | |||
OEM P/N: | 0100-90231 | OEM P/N: | 0100-01734 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Gap Servo PCB | Blade, Ceramic 200MM | |||
OEM P/N: | 0100-00991 0100-90824 0100-90463 0100-91055 |
OEM P/N: | 0020-83386 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
45W/65W Power Supply | W/L Door Mounting Bracket | |||
OEM P/N: | 0090-91640 0090-91641 |
OEM P/N: | 0020-96167 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
W/L Door Cylinder | Scan Ballscrew | |||
OEM P/N: | 0010-91709 0010-92007 |
OEM P/N: | 0040-92555 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Blade Motor Belt | N2 Vent Valve Pipeline | |||
OEM P/N: | 3080-90017 | OEM P/N: | 0040-93589 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Linear Transducer Magnet | Extraction Shield Top Hat | |||
OEM P/N: | 1350-90001 | OEM P/N: | 0040-95490 0040-91835 |
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TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
W/L Door Bracket | Gas Panel Pigtail | |||
OEM P/N: | 0040-91471 | OEM P/N: | 0040-99193 (PH3) 0040-99155 (BF3) |
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TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Argan Bleed Air Box Solenoid Valve | Pneumatic Controller (3C) Solenoid Valve | |||
OEM P/N: | 3870-90118 | OEM P/N: | N/A | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Wafer Loader Interlock Module | Air Bearing Module | |||
OEM P/N: | N/A | OEM P/N: | N/A | |
TOOL: | Varian E500 | TOOL: | Varian E500 | |
Manipulator Assembly | Accel Column Assembly | |||
OEM P/N: | E11000320 | OEM P/N: | E17007400 | |
TOOL: | Varian E500 | TOOL: | Varian E500 | |
Quad Magnet Power Supply | Filament Power Supply | |||
OEM P/N: | E11000090, E11000092 | OEM P/N: | E19002631 | |
TOOL: | Varian E500 | TOOL: | Varian E500 | |
Magnos Hall Probe Amplifier PCB | Faraday Cup PCB | |||
OEM P/N: | 104434001 | OEM P/N: | E15002602 | |
TOOL: | Varian E500 | TOOL: | Varian E500 | |
Extraction (GSD HE) | Extraction (GSD 200EE) | |||
OEM P/N: | 11031510, 1186240 11050070, 11A1310 |
OEM P/N: | 11028460 | |
TOOL: | Axcelis NV-GSD HE | TOOL: | Axcelis NV-GSD 200EE | |
Source Isolation Valve (V2) | Cryo Gate Valve (V8, V34) | |||
OEM P/N: | 3200247, 11009620 | OEM P/N: | 1069540, 3200502 | |
TOOL: | Axcelis NV-GSD HE | TOOL: | Axcelis NV-GSD HE | |
Resolver Faraday Assy | Flag Faraday Assy | |||
OEM P/N: | 110002710 | OEM P/N: | 1181831, 1181838 | |
TOOL: | Axcelis NV-GSD HE | TOOL: | Axcelis NV-GSD HE | |
Source Magnet Power Supply | Arc Power Supply | |||
OEM P/N: | EMS 25-25 | OEM P/N: | 1204990 | |
TOOL: | Axcelis NV-GSD HE | TOOL: | Axcelis NV-GSD HE | |
Quadruple Power Supply | Wafer Holder | |||
OEM P/N: | 2200118 PS/NV-20PN15 |
OEM P/N: | 1180300, 11035040 | |
TOOL: | Axcelis NV-GSD | TOOL: | Axcelis NV-GSD | |
Spindle Assembly | Arm Assembly | |||
OEM P/N: | 1180290, 1180900 (Belt) 1188490, 1193490 (DD) 1195830, 11029080 (300MM) |
OEM P/N: | N/A | |
TOOL: | Axcelis NV-GSD | TOOL: | Axcelis NV-GSD | |
ESC Platen | Platen Arm | |||
OEM P/N: | NI97-0858 | OEM P/N: | N/A | |
TOOL: | Exceed 2000A | TOOL: | NH-20SR |
Flight Tube (Quantum) | Hollow Gripper Arm 200MM | |||
OEM P/N: | 9010-01396 | OEM P/N: | 0010-99113 | |
TOOL: | AMAT Quantum II/III | TOOL: | AMAT 9500xR/xR80 | |
Extraction (Quantum) | Beam Profiler Assembly | |||
OEM P/N: | 9010-02393 | OEM P/N: | 0010-91721 | |
TOOL: | AMAT Quantum II/III | TOOL: | AMAT xR80/Quantum | |
Heatsink 150MM (Black) | Wheel Assembly 200MM | |||
OEM P/N: | 0040-94052 | OEM P/N: | N/A | |
TOOL: | AMAT PI9500 | TOOL: | AMAT 9500xR/xR80 | |
Fixed Restrain 150MM | Moving Clips 150MM | |||
OEM P/N: | 0040-97539 | OEM P/N: | N/A | |
TOOL: | AMAT PI9500 | TOOL: | AMAT PI9500 | |
Tilt Motor Assembly | Gas Panel | |||
OEM P/N: | 0010-91582 | TYPE: | HP/SDS | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Wafer clips actuator | Batch Notch Orienter | |||
OEM P/N: | 0010-90530 | OEM P/N: | 0010-91816 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Ion Source Head | Argon Bleed Air Box | |||
TYPE: | Bernas/IHC/G2 Tetrode | OEM P/N: | 0240-97138 | |
TOOL: | AMAT 9500xR/xR80/Quantum | TOOL: | AMAT 9500xR/xR80 | |
Angle Valve | W/L Isolation Valve | |||
TYPE: | NW16, NW40 | OEM P/N: | 0011-92388 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Water Pump | Angle Valve | |||
OEM M/N: | CRN4-80/7 | TYPE: | NW25, NW40 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
IHC Filament Power Supply | DAQ type B/H | |||
OEM P/N: | 1140-90182 XHR-7.5-80 |
OEM P/N: | 0090-90966 0090-90967 |
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TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80/Quantum | |
Source Suppression Power Supply |
High/Low Range Power Supply | |||
OEM P/N: | 0090-91155, 1140-90115 0090-93023, 0090-93024 |
OEM P/N: | 0090-91917 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT xR80 | |
5 Phase Stepper Controller | Source Head PCB | |||
OEM P/N: | 0100-90172 | OEM P/N: | 0100-94444 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Gas Interlock PCB | Wafer Loader Blade Control PCB | |||
OEM P/N: | 0100-90863 0100-99011 |
OEM P/N: | 0100-90229 0100-94036 |
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TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Transfer Arm Potentiometer | ||||
OEM P/N: | 1210-90737 | |||
TOOL: | AMAT 9500xR/xR80 | |||
W/L Door Open Sensor | W/L Door Close Sensor | |||
OEM P/N: | 1270-90151 & 0020-96785 | OEM P/N: | 1290-90110 & 0020-95145 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
DD Motor Top Box | G2 Source Head Body | |||
OEM P/N: | 0020-83599 | OEM P/N: | 0040-05869 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Cassette Indexer Motor | Gripper Arm Cable | |||
OEM P/N: | 1080-90048 | OEM P/N: | 9150-01755 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Filter-Cartridge | Filter Sleeve | |||
OEM P/N: | 4020-90030 | OEM P/N: | 4020-90040 | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
SMA-SMA Fiber cable | HFBR-SMA Fiber Cable | |||
OEM P/N: | N/A | OEM P/N: | N/A | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Moving Clips Actuator Pipe | Ion Gauge Cable Connector | |||
OEM P/N: | 0020-96596 | OEM P/N: | N/A | |
TOOL: | AMAT 9500xR/xR80 | TOOL: | AMAT 9500xR/xR80 | |
Dry Pump Filter | Angle Valve | |||
OEM P/N: | N/A | TYPE: | NW25, NW40 | |
TOOL: | Varian E500 | TOOL: | Varian E500 | |
Beamline Analyzer chamber | CCIG | |||
OEM P/N: | E17001070 | OEM P/N: | E23000001 | |
TOOL: | Varian E500 | TOOL: | Varian E500 | |
Suppression -5kV Power Supply | Suppression -2kV Power Supply | |||
OEM P/N: | E11001040 | OEM P/N: | E11000020, E11000022 | |
TOOL: | Varian E500 | TOOL: | Varian E500 | |
Cryo Gate Valve | Source Isolation Valve | |||
OEM P/N: | E11002140, E32000029 E11042510, E11002130 |
OEM P/N: | E11000360 | |
TOOL: | Varian E500 | TOOL: | Varian E500 | |
Extraction (GSD 33) | Resonator | |||
OEM P/N: | 1181620 | OEM P/N: | 11000370, 1089352 | |
TOOL: | Axcelis NV-GSD | TOOL: | Axcelis NV-GSD HE | |
Angle Valve (V15, V16, V18, V53) | In-Air Robot | |||
OEM P/N: | 1165630, 1181389 | OEM P/N: | 11029370 4693-0031-0001 |
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TOOL: | Axcelis NV-GSD HE | TOOL: | Axcelis NV-GSD HE | |
Lens/AMU Power Supply | Filament Power Supply | |||
OEM P/N: | 2100236 (EMS 40-150) | OEM P/N: | 11S8126 | |
TOOL: | Axcelis NV-GSD HE | TOOL: | Axcelis NV-GSD HE | |
Filament Power Supply | Cathode Power Supply | |||
OEM P/N: | 1214110, 11A1583 | OEM P/N: | 1214130 | |
TOOL: | Axcelis NV-GSD HE | TOOL: | Axcelis NV-GSD HE | |
Arm Motor | Vacuum Cassette 200MM | |||
OEM P/N: | 1181020, 1199160 | OEM P/N: | N/A | |
TOOL: | Axcelis NV-GSD | TOOL: | Axcelis NV-GSD | |
Resonator DI PCB | Unclamp Assembly | |||
OEM P/N: | 1522270 | OEM P/N: | 1184300, 1180270 | |
TOOL: | Axcelis NV-GSD HE | TOOL: | Axcelis NV-GSD | |
Ion Gauge Filament Power Supply | ||||
OEM P/N: | 1140-01104 332102 |
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TOOL: | AMAT Endura |
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P5000 ROBOT
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MFC,LFC
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Controllers
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ROBOT
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ARM
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RF電源
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MOTOR、ACTUATOR
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SOCKET
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BOARD
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IC CHIP