半導体製造装置関連 KAT株式会社

半導体製造業装置関連消耗部材及びメンテナンス事業

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ION IMPLANTER部品
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Flight Tube (9500xR)     Flight Tube (xR80)  
OEM P/N: 0010-91214   OEM P/N: 9010-00928
TOOL: AMAT 9500xR   TOOL: AMAT xR80
Extraction (9500xR)     Extraction (xR80)  
OEM P/N: 0010-91615   OEM P/N: 0010-93038
0010-93039
TOOL: AMAT 9500xR   TOOL: AMAT xR80
Heatsink 200MM (Black)     Heatsink 200MM (Grey)  
OEM P/N: 0040-95291   OEM P/N: 0040-95291
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
Fixed Restrain 200MM     Moving Clips 200MM  
OEM P/N: N/A   OEM P/N: 0010-91419
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
DD Spin Motor     DD Spin Motor  
OEM P/N: 0010-91581   OEM P/N: 9010-00054
TOOL: AMAT 9500xR/xR80   TOOL: AMAT xR80/Quantum
MRS Assembly     Blade Assembly  
OEM P/N: 0010-91802   OEM P/N: 0010-99092
TOOL: AMAT 9500xR/xR80/Quantum   TOOL: AMAT 9500xR/xR80
Cassette Indexer 200MM     HDPFS Assembly  
OEM P/N: 0010-91312   OEM P/N: 0240-61079
0240-91922
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
Source Isolation Valve     Cryo Gate Valve   
OEM P/N: 0010-91829   OEM M/N: 11210-1201R
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
Cassette Tray 200MM     Carousel 200MM  
OEM P/N: 0010-92132   OEM P/N: 0010-92188
TOOL: AMAT xR80   TOOL: AMAT 9500xR/xR80
AMU Power Supply     Suppression Clamp
Box
 
OEM P/N: 1140-00254
1140-90093
  OEM P/N: 0090-91799
0090-91816
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
G2 Power Supply     Focus Power Supply  
OEM P/N: 1140-90164   OEM P/N: 0090-91806,
0090-91415ITL
TOOL: AMAT xR80   TOOL: AMAT xR80
Batch Notch Orienter
Micro Controller (RECIF)
    PFS Power Supply  
OEM P/N: 0090-91689   OEM P/N: 1140-90090
TOOL: AMAT xR80   TOOL: AMAT 9500xR/xR80
Wafer Loader Cassette Indexer PCB     EVR Lateral Servo PCB  
OEM P/N: 0100-90231   OEM P/N: 0100-01734
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
Gap Servo PCB     Blade, Ceramic 200MM  
OEM P/N: 0100-00991
0100-90824
0100-90463
0100-91055
  OEM P/N: 0020-83386
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
45W/65W Power Supply     W/L Door Mounting Bracket   
OEM P/N: 0090-91640
0090-91641
  OEM P/N: 0020-96167
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
W/L Door Cylinder     Scan Ballscrew  
OEM P/N: 0010-91709
0010-92007
  OEM P/N: 0040-92555
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
Blade Motor Belt     N2 Vent Valve Pipeline  
OEM P/N: 3080-90017   OEM P/N: 0040-93589
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
Linear Transducer Magnet     Extraction Shield Top Hat  
OEM P/N: 1350-90001   OEM P/N: 0040-95490
0040-91835
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
W/L Door Bracket     Gas Panel Pigtail  
OEM P/N: 0040-91471   OEM P/N: 0040-99193 (PH3)
0040-99155 (BF3)
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
Argan Bleed Air Box Solenoid Valve     Pneumatic Controller (3C) Solenoid Valve  
OEM P/N: 3870-90118   OEM P/N: N/A
TOOL: AMAT 9500xR/xR80   TOOL: AMAT 9500xR/xR80
Wafer Loader Interlock Module     Air Bearing Module  
OEM P/N: N/A   OEM P/N: N/A
TOOL: Varian E500   TOOL: Varian E500
Manipulator Assembly     Accel Column Assembly  
OEM P/N: E11000320   OEM P/N: E17007400
TOOL: Varian E500   TOOL: Varian E500
Quad Magnet Power Supply     Filament Power Supply  
OEM P/N: E11000090, E11000092   OEM P/N: E19002631
TOOL: Varian E500   TOOL: Varian E500
Magnos Hall Probe Amplifier PCB     Faraday Cup PCB  
OEM P/N: 104434001   OEM P/N: E15002602
TOOL: Varian E500   TOOL: Varian E500
Extraction (GSD HE)     Extraction (GSD 200EE)  
OEM P/N: 11031510, 1186240
11050070, 11A1310
  OEM P/N: 11028460
TOOL: Axcelis NV-GSD HE   TOOL: Axcelis NV-GSD 200EE
Source Isolation Valve (V2)     Cryo Gate Valve (V8, V34)  
OEM P/N: 3200247, 11009620   OEM P/N: 1069540, 3200502
TOOL: Axcelis NV-GSD HE   TOOL: Axcelis NV-GSD HE
Resolver Faraday Assy     Flag Faraday Assy  
OEM P/N: 110002710   OEM P/N: 1181831, 1181838
TOOL: Axcelis NV-GSD HE   TOOL: Axcelis NV-GSD HE
Source Magnet Power Supply     Arc Power Supply   
OEM P/N: EMS 25-25   OEM P/N: 1204990
TOOL: Axcelis NV-GSD HE   TOOL: Axcelis NV-GSD HE
Quadruple Power Supply     Wafer Holder  
OEM P/N: 2200118
PS/NV-20PN15
  OEM P/N: 1180300, 11035040
TOOL: Axcelis NV-GSD   TOOL: Axcelis NV-GSD
Spindle Assembly     Arm Assembly  
OEM P/N: 1180290, 1180900 (Belt)
1188490, 1193490 (DD)
1195830, 11029080 (300MM)
  OEM P/N: N/A
TOOL: Axcelis NV-GSD   TOOL: Axcelis NV-GSD
ESC Platen     Platen Arm  
OEM P/N: NI97-0858   OEM P/N: N/A
TOOL: Exceed 2000A   TOOL: NH-20SR
Flight Tube (Quantum)   Hollow Gripper Arm 200MM
OEM P/N: 9010-01396 OEM P/N: 0010-99113
TOOL: AMAT Quantum II/III  TOOL: AMAT 9500xR/xR80
Extraction (Quantum)   Beam Profiler Assembly  
OEM P/N: 9010-02393 OEM P/N: 0010-91721
TOOL: AMAT Quantum II/III  TOOL: AMAT xR80/Quantum
Heatsink 150MM (Black) Wheel Assembly 200MM
OEM P/N: 0040-94052 OEM P/N: N/A
TOOL: AMAT PI9500 TOOL: AMAT 9500xR/xR80
Fixed Restrain 150MM Moving Clips 150MM
OEM P/N: 0040-97539 OEM P/N: N/A
TOOL: AMAT PI9500 TOOL: AMAT PI9500
Tilt Motor Assembly Gas Panel
OEM P/N: 0010-91582 TYPE: HP/SDS
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
Wafer clips actuator Batch Notch Orienter 
OEM P/N: 0010-90530 OEM P/N: 0010-91816
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
Ion Source Head Argon Bleed Air Box
TYPE: Bernas/IHC/G2 Tetrode OEM P/N: 0240-97138
TOOL: AMAT 9500xR/xR80/Quantum TOOL: AMAT 9500xR/xR80
Angle Valve W/L Isolation Valve
TYPE: NW16, NW40 OEM P/N: 0011-92388
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
Water Pump Angle Valve
OEM M/N: CRN4-80/7 TYPE: NW25, NW40
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
IHC Filament Power Supply DAQ type B/H
OEM P/N: 1140-90182
XHR-7.5-80
OEM P/N: 0090-90966
0090-90967
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80/Quantum
Source Suppression
Power Supply 
High/Low Range Power Supply
OEM P/N: 0090-91155,
1140-90115
0090-93023,
0090-93024
OEM P/N: 0090-91917
TOOL: AMAT 9500xR/xR80 TOOL: AMAT xR80
5 Phase Stepper Controller Source Head PCB
OEM P/N: 0100-90172 OEM P/N: 0100-94444
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
Gas Interlock PCB Wafer Loader Blade Control PCB
OEM P/N: 0100-90863
0100-99011
OEM P/N: 0100-90229
0100-94036
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
Transfer Arm Potentiometer    
OEM P/N: 1210-90737    
TOOL: AMAT 9500xR/xR80    
W/L Door Open Sensor W/L Door Close Sensor
OEM P/N: 1270-90151 & 0020-96785 OEM P/N: 1290-90110 & 0020-95145
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
DD Motor Top Box G2 Source Head Body
OEM P/N: 0020-83599 OEM P/N: 0040-05869
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
Cassette Indexer Motor Gripper Arm Cable
OEM P/N: 1080-90048 OEM P/N: 9150-01755
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
Filter-Cartridge Filter Sleeve
OEM P/N: 4020-90030 OEM P/N: 4020-90040
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
SMA-SMA Fiber cable HFBR-SMA Fiber Cable
OEM P/N: N/A OEM P/N: N/A
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
Moving Clips Actuator Pipe Ion Gauge Cable Connector
OEM P/N: 0020-96596 OEM P/N: N/A
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
Dry Pump Filter Angle Valve
OEM P/N: N/A TYPE: NW25, NW40
TOOL: Varian E500 TOOL: Varian E500
Beamline Analyzer chamber CCIG
OEM P/N: E17001070 OEM P/N: E23000001
TOOL: Varian E500 TOOL: Varian E500
Suppression -5kV Power Supply Suppression -2kV Power Supply
OEM P/N: E11001040 OEM P/N: E11000020, E11000022
TOOL: Varian E500 TOOL: Varian E500
Cryo Gate Valve Source Isolation Valve
OEM P/N: E11002140, E32000029
E11042510, E11002130
OEM P/N: E11000360
TOOL: Varian E500 TOOL: Varian E500
Extraction (GSD 33) Resonator
OEM P/N: 1181620 OEM P/N: 11000370, 1089352
TOOL: Axcelis NV-GSD TOOL: Axcelis NV-GSD HE
Angle Valve (V15, V16, V18, V53) In-Air Robot
OEM P/N: 1165630, 1181389 OEM P/N: 11029370
4693-0031-0001
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD HE
Lens/AMU Power Supply Filament Power Supply
OEM P/N: 2100236 (EMS 40-150) OEM P/N: 11S8126
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD HE
Filament Power Supply Cathode Power Supply 
OEM P/N: 1214110, 11A1583  OEM P/N: 1214130
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD HE
Arm Motor Vacuum Cassette 200MM
OEM P/N: 1181020, 1199160 OEM P/N: N/A
TOOL: Axcelis NV-GSD TOOL: Axcelis NV-GSD
Resonator DI PCB Unclamp Assembly
OEM P/N: 1522270 OEM P/N: 1184300, 1180270
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD
Ion Gauge Filament Power Supply    
OEM P/N: 1140-01104
332102
   
TOOL: AMAT Endura    

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