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ION IMPLANTER部品
販売・Exchange・修理

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Flight Tube (9500xR) 　 Flight Tube (xR80)
OEM P/N: 0010-91214 OEM P/N: 9010-00928
TOOL: AMAT 9500xR TOOL: AMAT xR80
Extraction (9500xR) 　 Extraction (xR80) 　
OEM P/N: 0010-91615 OEM P/N: 0010-93038
0010-93039
TOOL: AMAT 9500xR TOOL: AMAT xR80
PATC P/N: Repair PATC P/N: P0120069
Heatsink 200MM (Black) Heatsink 200MM (Grey)
OEM P/N: 0040-95291 OEM P/N: 0040-95291
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: P0120042 PATC P/N: Inquiry
Fixed Restrain 200MM 　 Moving Clips 200MM
OEM P/N: N/A OEM P/N: 0010-91419
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: P0120114 PATC P/N: P0120134
DD Spin Motor DD Spin Motor
OEM P/N: 0010-91581 OEM P/N: 9010-00054
TOOL: AMAT 9500xR/xR80 TOOL: AMAT xR80/Quantum
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
MRS Assembly Blade Assembly
OEM P/N: 0010-91802 OEM P/N: 0010-99092
TOOL: AMAT 9500xR/xR80/Quantum TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Cassette Indexer 200MM HDPFS Assembly
OEM P/N: 0010-91312 OEM P/N: 0240-61079
0240-91922
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair
Source Isolation Valve Cryo Gate Valve 
OEM P/N: 0010-91829 OEM M/N: 11210-1201R
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Cassette Tray 200MM Carousel 200MM
OEM P/N: 0010-92132 OEM P/N: 0010-92188
TOOL: AMAT xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
AMU Power Supply Suppression Clamp
Box
OEM P/N: 1140-00254
1140-90093		 OEM P/N: 0090-91799
0090-91816
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
G2 Power Supply Focus Power Supply
OEM P/N: 1140-90164 OEM P/N: 0090-91806,
0090-91415ITL
TOOL: AMAT xR80 TOOL: AMAT xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Batch Notch Orienter
Micro Controller (RECIF)		 PFS Power Supply
OEM P/N: 0090-91689 OEM P/N: 1140-90090
TOOL: AMAT xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Wafer Loader Cassette Indexer PCB EVR Lateral Servo PCB
OEM P/N: 0100-90231 OEM P/N: 0100-01734
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Gap Servo PCB Blade, Ceramic 200MM
OEM P/N: 0100-00991
0100-90824
0100-90463
0100-91055		 OEM P/N: 0020-83386
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: P0120037
45W/65W Power Supply W/L Door Mounting Bracket 
OEM P/N: 0090-91640
0090-91641		 OEM P/N: 0020-96167
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: P0010034, P0010037 PATC P/N: A1120044, A1120035
W/L Door Cylinder Scan Ballscrew
OEM P/N: 0010-91709
0010-92007		 OEM P/N: 0040-92555
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: P0090024 PATC P/N: P0120025
Blade Motor Belt N2 Vent Valve Pipeline
OEM P/N: 3080-90017 OEM P/N: 0040-93589
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: SM0090008 PATC P/N: P0090025
Linear Transducer Magnet Extraction Shield Top Hat
OEM P/N: 1350-90001 OEM P/N: 0040-95490
0040-91835
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: P0990023 PATC P/N: P0160040, P0160041
W/L Door Bracket Gas Panel Pigtail
OEM P/N: 0040-91471 OEM P/N: 0040-99193 (PH3)
0040-99155 (BF3)
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: P0160103 PATC P/N: Inquiry
Argan Bleed Air Box Solenoid Valve Pneumatic Controller (3C) Solenoid Valve
OEM P/N: 3870-90118 OEM P/N: N/A
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: A1020011 PATC P/N: P0990014
Wafer Loader Interlock Module Air Bearing Module
OEM P/N: N/A OEM P/N: N/A
TOOL: Varian E500 TOOL: Varian E500
PATC P/N: Inquiry PATC P/N: PE500ABS-M1
Manipulator Assembly Accel Column Assembly
OEM P/N: E11000320 OEM P/N: E17007400
TOOL: Varian E500 TOOL: Varian E500
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchage
Quad Magnet Power Supply Filament Power Supply
OEM P/N: E11000090, E11000092 OEM P/N: E19002631
TOOL: Varian E500 TOOL: Varian E500
PATC P/N: Repair PATC P/N: Repair
Magnos Hall Probe Amplifier PCB Faraday Cup PCB
OEM P/N: 104434001 OEM P/N: E15002602
TOOL: Varian E500 TOOL: Varian E500
PATC P/N: Repair PATC P/N: Repair
Extraction (GSD HE) Extraction (GSD 200EE)
OEM P/N: 11031510, 1186240
11050070, 11A1310		 OEM P/N: 11028460
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD 200EE
PATC P/N: Repair/Exchange PATC P/N: Repair
Source Isolation Valve (V2) Cryo Gate Valve (V8, V34)
OEM P/N: 3200247, 11009620 OEM P/N: 1069540, 3200502
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD HE
PATC P/N: Repair/Exchange PATC P/N: Repair
Resolver Faraday Assy Flag Faraday Assy
OEM P/N: 110002710 OEM P/N: 1181831, 1181838
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD HE
PATC P/N: Repair PATC P/N: Repair
Source Magnet Power Supply Arc Power Supply 
OEM P/N: EMS 25-25 OEM P/N: 1204990
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD HE
PATC P/N: Repair PATC P/N: Repair/Exchange
Quadruple Power Supply Wafer Holder
OEM P/N: 2200118
PS/NV-20PN15		 OEM P/N: 1180300, 11035040
TOOL: Axcelis NV-GSD TOOL: Axcelis NV-GSD
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Spindle Assembly Arm Assembly
OEM P/N: 1180290, 1180900 (Belt)
1188490, 1193490 (DD)
1195830, 11029080 (300MM)		 OEM P/N: N/A
TOOL: Axcelis NV-GSD TOOL: Axcelis NV-GSD
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
ESC Platen Platen Arm
OEM P/N: NI97-0858 OEM P/N: N/A
TOOL: Exceed 2000A TOOL: NH-20SR
PATC P/N: Repair PATC P/N: Repair
 
Flight Tube (Quantum) 　 Hollow Gripper Arm 200MM
OEM P/N: 9010-01396 OEM P/N: 0010-99113
TOOL: AMAT Quantum II/III  TOOL: AMAT 9500xR/xR80
Extraction (Quantum) 　 Beam Profiler Assembly 　
OEM P/N: 9010-02393 OEM P/N: 0010-91721
TOOL: AMAT Quantum II/III  TOOL: AMAT xR80/Quantum
PATC P/N: Repair PATC P/N: Repair
Heatsink 150MM (Black) Wheel Assembly 200MM
OEM P/N: 0040-94052 OEM P/N: N/A
TOOL: AMAT PI9500 TOOL: AMAT 9500xR/xR80
PATC P/N: Inquiry PATC P/N: Repair/Exchange
Fixed Restrain 150MM Moving Clips 150MM
OEM P/N: 0040-97539 OEM P/N: N/A
TOOL: AMAT PI9500 TOOL: AMAT PI9500
PATC P/N: P0120089 PATC P/N: P0120090
Tilt Motor Assembly Gas Panel
OEM P/N: 0010-91582 TYPE: HP/SDS
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Inquiry
Wafer clips actuator Batch Notch Orienter 
OEM P/N: 0010-90530 OEM P/N: 0010-91816
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Ion Source Head Argon Bleed Air Box
TYPE: Bernas/IHC/G2 Tetrode OEM P/N: 0240-97138
TOOL: AMAT 9500xR/xR80/Quantum TOOL: AMAT 9500xR/xR80
PATC P/N: Repair PATC P/N: Repair/Exchange
Angle Valve W/L Isolation Valve
TYPE: NW16, NW40 OEM P/N: 0011-92388
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair PATC P/N: Repair/Exchange
Water Pump Angle Valve
OEM M/N: CRN4-80/7 TYPE: NW25, NW40
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair
IHC Filament Power Supply DAQ type B/H
OEM P/N: 1140-90182
XHR-7.5-80		 OEM P/N: 0090-90966
0090-90967
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80/Quantum
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Source Suppression
Power Supply 		 High/Low Range Power Supply
OEM P/N: 0090-91155,
1140-90115
0090-93023,
0090-93024		 OEM P/N: 0090-91917
TOOL: AMAT 9500xR/xR80 TOOL: AMAT xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
5 Phase Stepper Controller Source Head PCB
OEM P/N: 0100-90172 OEM P/N: 0100-94444
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: P0030078 PATC P/N: P0030157
Gas Interlock PCB Wafer Loader Blade Control PCB
OEM P/N: 0100-90863
0100-99011		 OEM P/N: 0100-90229
0100-94036
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Transfer Arm Potentiometer 　 　
OEM P/N: 1210-90737 　 　
TOOL: AMAT 9500xR/xR80 　 　
PATC P/N: P0160042 　 　
W/L Door Open Sensor W/L Door Close Sensor
OEM P/N: 1270-90151 & 0020-96785 OEM P/N: 1290-90110 & 0020-95145
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: A1170014 PATC P/N: A1020014
DD Motor Top Box G2 Source Head Body
OEM P/N: 0020-83599 OEM P/N: 0040-05869
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Inquiry PATC P/N: Inquiry
Cassette Indexer Motor Gripper Arm Cable
OEM P/N: 1080-90048 OEM P/N: 9150-01755
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: A1120031 PATC P/N: P0190036-1
Filter-Cartridge Filter Sleeve
OEM P/N: 4020-90030 OEM P/N: 4020-90040
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Inquiry PATC P/N: A1080020
SMA-SMA Fiber cable HFBR-SMA Fiber Cable
OEM P/N: N/A OEM P/N: N/A
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: Inquiry PATC P/N: Inquiry
Moving Clips Actuator Pipe Ion Gauge Cable Connector
OEM P/N: 0020-96596 OEM P/N: N/A
TOOL: AMAT 9500xR/xR80 TOOL: AMAT 9500xR/xR80
PATC P/N: P0160017 PATC P/N: P0190046
Dry Pump Filter Angle Valve
OEM P/N: N/A TYPE: NW25, NW40
TOOL: Varian E500 TOOL: Varian E500
PATC P/N: Inquiry PATC P/N: Repair
Beamline Analyzer chamber CCIG
OEM P/N: E17001070 OEM P/N: E23000001
TOOL: Varian E500 TOOL: Varian E500
PATC P/N: Exchange PATC P/N: Repair/Exchange
Suppression -5kV Power Supply Suppression -2kV Power Supply
OEM P/N: E11001040 OEM P/N: E11000020, E11000022
TOOL: Varian E500 TOOL: Varian E500
PATC P/N: Repair PATC P/N: Repair
Cryo Gate Valve Source Isolation Valve
OEM P/N: E11002140, E32000029
E11042510, E11002130		 OEM P/N: E11000360
TOOL: Varian E500 TOOL: Varian E500
PATC P/N: Repair PATC P/N: Repair/Exchange
Extraction (GSD 33) Resonator
OEM P/N: 1181620 OEM P/N: 11000370, 1089352
TOOL: Axcelis NV-GSD TOOL: Axcelis NV-GSD HE
PATC P/N: Repair PATC P/N: Repair
Angle Valve (V15, V16, V18, V53) In-Air Robot
OEM P/N: 1165630, 1181389 OEM P/N: 11029370
4693-0031-0001
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD HE
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Lens/AMU Power Supply Filament Power Supply
OEM P/N: 2100236 (EMS 40-150) OEM P/N: 11S8126
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD HE
PATC P/N: Repair PATC P/N: Repair
Filament Power Supply Cathode Power Supply 
OEM P/N: 1214110, 11A1583  OEM P/N: 1214130
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD HE
PATC P/N: Repair/Exchange PATC P/N: Repair
Arm Motor Vacuum Cassette 200MM
OEM P/N: 1181020, 1199160 OEM P/N: N/A
TOOL: Axcelis NV-GSD TOOL: Axcelis NV-GSD
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Resonator DI PCB Unclamp Assembly
OEM P/N: 1522270 OEM P/N: 1184300, 1180270
TOOL: Axcelis NV-GSD HE TOOL: Axcelis NV-GSD
PATC P/N: Repair/Exchange PATC P/N: Repair/Exchange
Ion Gauge Filament Power Supply 　 　
OEM P/N: 1140-01104
332102		 　 　
TOOL: AMAT Endura 　 　
PATC P/N: Repair/Exchange 　 　

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